| X,Y,Z Measurement Travel (mm) | 500x400x200 |
| Overall dimensions (cm) | 150x92x160cm |
| Machine weight | 400 kg |
| Repeatability | 2 µm |
| Max table load | 20kg |
| Operation mode | Manual |
| Resolution | 0.5µm scale |
| X,Y measurement precision | (3+ L/200) µm |
| Light Source system |
Software controlled 8 zone surface light and straight contour light |
| Structure | Granite base and mast |
| Lens | High precision Tele-centric manual lens |
| Magnification |
Optical enlarging rate 0.7-4.5x, image enlarging rate 30-200x |
| Vision system | 1/3” SONY sensor CCD |
Inquiry - L-5040